MEMS Laboratory at Oakland University
The MEMS (Micro-Electro-Mechanical Systems) Laboratory at the Electrical and Computer Engineering Department, Oakland University was established in 2007 by Dr. Hongwei Qu. Since its inception, the MEMS Laboratory has conducted a number of federal, state and industrial projects, along with some intramural projects.
The MEMS Lab is consisted of a 1000-sqft Grade 1000 clean room for MEMS device fabrication and examination; a 500-sqft lab for device design, characterization and electronics implementation. Recently, the lab is further equipped with a scanning electron microscope (SEM) with energy dispersive spectroscopy (EDS) capability for micro analysis and MEMS process development. Oakland MEMS Laboratory is affiliated with Lurie Nanofabrication Facility (LNF) for microfabrication of MEMS devices. Other commercial foundry services have also been utilized.
- CMOS-MEMS Technology
- MEMS Inertial Sensors
- MEMS Biological Sensors and Applications
- RF-MEMS Devices
- MEMS Based Medical Devices and Systems
Selected Current Projects
Dr. Qu's research has been supported by NSF, MEDC, NEA, and industrial companies. A number of projectes have been completed since Dr. Qu joined OU.
Publications resulted from the following and other projects can be found in Publicaiton Tab.
- Magnetic Materials and Sensors
The goal of this NSF project is to implement and apply high-sensitivity magnetic sensor and sensor arrays in biomedical imaging. MEMS technologies are used in magnetostrictive sensor fabrication to enable device miniaturization and sensor array layout.
This is a colaborative project in which Dr. Gopalan Srinivasan's group at Physics Department contributes magnetic material preparation.
Bonded silicon-quartz in fabrication
- Electrothermal MEMS Switches
Single actuator action video
- Electrothermal MEMS Gripper
SEM photo of the gripper. For operation of the gripper, see below.
The following clip demonstrates the gripper, with an openning up to 170 micrometers, trying to hold a hair.
Tweezers holding hair
The feature size is about 100 um.
- Fully Differential Metal MEMS Accelerometer
Fully differential scheme is uniquely realized in the metal metal accelerometer fabricated using MetalMUMPs technology.
PAMID - Portable Automonous Multisensory Intervention Device - is a biomedical device for patients monitoring. It is capable of real-time monitoring of multiple physiological parameters for early stage detection of agitation. It can also provide on-site intervention to patients per detection of agitation.
This is a collaborative project with Dr. Cheryl Riley-Doucet at the School of Nursing. PAMID is currently under clinical tests.
System configuration and preliminary results
Pilot study on senior volunteers
Clinical study at Pine Tree Place, an assisted living house.
(Picture is not shown due to privacy considerations.)
This piece of metrological instrument provide us and other research groups on campus yet another powerful tool in micro/nano research.